Cite the paper
Mechanics, Materials Science & Engineering, 11 (1), 2017, ISSN: 2412-5954.
Authors: P. Ashok Kumar, G.K.S. Prakash Raaju, K. Srinivasa Rao
ABSTRACT. MEMS Accelerometers are one of the most common inertial sensors, a dynamic sensor capable of a vast range of sensing. The basic principle of operation behind the MEMS accelerometer is the displacement of a small proof mass etched into the silicon surface of the integrated circuit and suspended by small beams. MEMS accelerometers in Structural Health Monitoring systems can be able to measure the range of acceleration ±4g with increasing sensitivity and decreasing cross sensitivity. In this paper, we have designed and simulated the MEMS capacitive comb drive accelerometer with respect to the vibrational frequency of the chest wall. The design consists of a proof mass (4000µm×6200µm) with movable electrodes (2500µm×200µm), fixed beam of electrodes (2500µm×200µm) and a cantilever beam as a spring (1000µm×2000µm). The Device operates in dynamic mode and simulated using COMSOL MULTIPHYSICS 5.2 version software. The output total displacement at 20 Hz is 1.52E-10 µm and at 40 Hz is 1.45E-9µm, acceleration at 20 Hz is 9.63E-7 m/s2 and at 40 Hz is 9.19E-6 m/s2 is measured. The simulated results are correlated to the modeling results at the range of frequency 20 Hz – 40 Hz.
Keywords: inertial sensors, MEMS accelerometer, sensitivity capacitive comb drive, proof mass
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