Design and Simulation of Capacitive Type Comb-Drive Accelerometer to Detect Heart Beat Frequency

<- Back to II. Mechanical Engineering & Physics Vol. 11

Cite the paper

Kumar, Ashok P; Raaju, Prakash G K S; Rao, Srinivasa K

Design and Simulation of Capacitive Type Comb-Drive Accelerometer to Detect Heart Beat Frequency Journal Article

Mechanics, Materials Science & Engineering, 11 (1), 2017, ISSN: 2412-5954.

Abstract | Links | BibTeX

Authors: P. Ashok Kumar, G.K.S. Prakash Raaju, K. Srinivasa Rao

ABSTRACT. MEMS Accelerometers are one of the most common inertial sensors, a dynamic sensor capable of a vast range of sensing. The basic principle of operation behind the MEMS accelerometer is the displacement of a small proof mass etched into the silicon surface of the integrated circuit and suspended by small beams. MEMS accelerometers in Structural Health Monitoring systems can be able to measure the range of acceleration ±4g with increasing sensitivity and decreasing cross sensitivity. In this paper, we have designed and simulated the MEMS capacitive comb drive accelerometer with respect to the vibrational frequency of the chest wall. The design consists of a proof mass (4000µm×6200µm) with movable electrodes (2500µm×200µm), fixed beam of electrodes (2500µm×200µm) and a cantilever beam as a spring (1000µm×2000µm). The Device operates in dynamic mode and simulated using COMSOL MULTIPHYSICS 5.2 version software. The output total displacement at 20 Hz is 1.52E-10 µm and at 40 Hz is 1.45E-9µm, acceleration at 20 Hz is 9.63E-7 m/s2 and at 40 Hz is 9.19E-6 m/s2 is measured. The simulated results are correlated to the modeling results at the range of frequency 20 Hz – 40 Hz.

Keywords: inertial sensors, MEMS accelerometer, sensitivity capacitive comb drive, proof mass

DOI 10.2412/mmse.20.62.334

References

[1] P. Ake Oberg, “Optical sensors for heart-and respiratory rate measurements”, Engineering in medicine and biology society, 1996. Bridging disciplines for Biomedicine. Proceedings of the 18th Annual international Conference of the IEEE.

[2] Xu Wang, Jingjing Jin and Shilong Li, “Measurement and analysis of Heart Signal Based on the Pressure Sensor”, 2008 6th IEEE international conference on Industrial Informatics Year:2008.

[3] Domenico Zito, Domenico Pepe, Bruno Neri, “Werable System-on-a-chip pulse radar sensors for Health Care: System Overview”, Advanced Information Networking and Applications Workshops, 2007, AINAW ’07. 21st International Conference on Year: 2007, Volume: 2.

[4] Siram Sai Krishna, Nuti Venkata Subrahmanya Ayyappa Sai, Dr.K.Srinivasa Rao Alain Beliveau, (1999) Design and Simulation of MEMS-based Piezoelectric Accelerometer.. Evaluation of MEMS Capacitive Accelerometers. IEEE Explore, 1-9.

[5] B. S.Kavitha, S. B. (n.d.). Capacitive Accelerometer Characteristics Study. IEEE Explore, 1.

[6] Ndu Osonwanne, J. V. (2010). MEMS Comb Drive Reduction Deyond Minimum Feature Size: A Computational Study. IEEE Explore, 1-5.

[7] Senturia, S. D. (2001). Microsystem Design. Dordrecht: Kluwer Academic Publishers.

[8] Shefali Gupta, T. P. (2005). Optimizing the Performance of MEMS Electrostatic Comb Drive Actuator with Different Flexure Springs. IEEE Explore, 1-6.

Creative Commons Licence
Mechanics, Materials Science & Engineering Journal by Magnolithe GmbH is licensed under a Creative Commons Attribution 4.0 International License.
Based on a work at www.mmse.xyz.