Development of Force Monitoring Transducers Using Novel Micro-Electromechanical Sensor (MEMS)

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Dimitar Chakarov, Vladimir Stavrov, Detelina Ignatova, Assen Shulev, Mihail Tsveov, Rumen Krastev & Ivo Vuchkov (2016). Development of Force Monitoring Transducers Using Novel Micro-Electromechanical Sensor (MEMS). Mechanics, Materials Science & Engineering Vol.6, pp. 158-168, doi: 10.13140/RG.2.2.20337.48487

Authors: Dimitar Chakarov, Vladimir Stavrov, Detelina Ignatova, Assen Shulev, Mihail Tsveov, Rumen Krastev, Ivo Vuchkov

ABSTRACT. MEMS piezoresistive sensors are a favourable and attractive option for strain detection due to a number of key advantages such as high sensitivity, low noise, good scaling characteristics, low cost and their ability to have the detection electronics circuit farther away from the sensor or on the same sensing board. This paper represents the results obtained at characterization of novel transducers to be employed into force monitoring systems. Each transducer comprises a coherently designed novel mechanical transducer and a positional MEMS sensor with very high accuracy.  The exploited positional MEMS microsensor and the mechanical transducer are presented in this paper. The particular MEMS sensor provides a voltage output signal having sensitivity in the range of 240 µV/µm at 1V DC voltage supply. The range of operation of the mechanical transducer is optimized to fit the 500 µm travel range of the microsensor. A finite element model is constructed to simulate the system structure using the commercial FE package. Two prototypes of force transducers are described and manner of used silicon MEMS sensor attachment is demonstrated.  An experimental set-up and experimentally measured load curve are presented in the paper. Diagrams force/voltage for two prototypes at different supply voltage 1V and 2V are revealed.

Keywords: mechanical, transducer, force, monitoring, MEMS, piezoresistive, sensor, experimental, data

DOI 10.13140/RG.2.2.20337.48487


[1] Kumar, Sh., K P Venkatesh, S. S. Baskar, S. P. Madhavi. System integration design in MEMS–A case study of micromachined load cell. – Sadhana, Vol. 34, 2009, No. 4, pp. 663–675.

[2] Won, S. M., Hoon-Sik Kim, N. Lu, Dae-Gon Kim, Cesar Del Solar, T. Duenas, A. Ameen, J. A. Rogers. Piezoresistive Strain Sensors and Multiplexed Arrays Using Assemblies of Single-Crystalline Silicon Nanoribbons on Plastic Substrates. – IEEE Transactions on electron devices, Vol. 58, No. 11, 2011,pp. 4074- 4078.

[3] Nagy, M.; C. Apanius; J. A. Siekkinen. A user friendly, high-sensitivity strain gauge. – Sensors, Vol. 18, 2001, pp. 20-27.

[4] Hrovat, M., D. Belavic, Z. Samardzija, J. Holc. An investigation of thick-film resistor, fired at different temperatures, for strain sensors. – International Spring Seminar on Electronics Technology, 2001, pp. 32-36.

[5] Mohammed A., W. Moussa, E. Lou. Mechanical Strain Measurements Using Semiconductor Piezo-resistive Material.The 4th IEEE International Conference on MEMS, Nano and Smart Systems, and The 6th IEEE International Workshop on System-on-Chip for Real-Time Applications 2006, pp.5-6.

[6] Mohammed, A., W. A. Moussa, E. Lou. High-Performance Piezoresistive MEMS Strain Sensor with Low Thermal Sensitivity. – Sensors, Vol. 11, 2011, pp. 1819-1846; DOI: 10.3390/s110201819].

[7] Cao, L., T. Kim, S. Mantell, D. Polla. Simulation and fabrication of piezoresistive membrane type MEMS strain sensors. – Sensors and Actuators A: Physical, Vol. 80, 2000, pp. 273-279.

[8] Han, B., J. Ou. Embedded piezoresistive cement-based stress/strain sensor. – Sensors and Actuators A: Physical, Vol. 138, 2007, pp. 294-298.

[9] Fraden, J. Handbook of modern sensor: physics, designs, and applications. 2nd ed. AIP Press-Springer: New York, 1996.

[10] Torrents, A, K. Azgin, S. W. Godfrey, E. S. Topalli, T. Akin, L. Valdevit. MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal design. – J. Micromech. Microeng., Vol. 20, No. 12,  2010, pp. 1-17. DOI: 10.1088/0960-1317/20/12/125004.

[11] Stavrov, V., Tomerov, E., Stavreva, G., Hardalov, C., Shulev, A., “Lateral Displacement MEMS Sensor,” Proc. Eurosensors XXIV, Linz, Austria, 2010, pp. 649-652

[12] Stavrov, V., Todorov, V., Shulev, A., Hardalov. C., “MEMS Sensors for mm-Range Displacement Measurements with Sub-nm-Resolution”, Proc. of SPIE Conf. Microtechn, Grenoble, France, 2013, v. 8763 87632G-1-6A.

[13] Todorov, V., Stavreva, G., Stavrov, V., “Contact mode MEMS position sensors with piezoresistive detection” Proc. XXVIII EUROSENSORS 2014, Brescia, Italy.

[14] Stavrov V., Shulev A., Chakarov D., Stavreva G., Force monitoring transducers with more than 100,000 scale intervals, Proc. of SPIE Conf. Microtechn, Barcelona, Spain, 2015, v. 9517 95171Q-1-6.

[15] Pham, H., Chen, I., “Stiffness modeling of flexure parallel mechanism”, Precision. Engineering 29, 2005, pp. 467–478.

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