Numerical Investigation in Piezoresistive Pressure Sensors

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Dehghani, Hamid

Numerical Investigation in Piezoresistive Pressure Sensors Journal Article

Mechanics, Materials Science & Engineering, 13 (1), 2017, ISSN: 2412-5954.

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Authors: Hamid Dehghani

ABSTRACT. In this paper, a Piezoresistive Micro Electro Mechanical System (MEMS) pressure sensor has been optimized. This paper finds an optimal diaphragm shape with optimum hole by numerical method, Finite Element Method (FEM). Circular, square, and rectangular diaphragms are measured in this paper. Additional aim of this study is to find out the effect of holes, temperature, and material in these diaphragms. Regarding to applied stress and sensor output, results were showing that gold-circulate-shape diaphragms are performing much more efficient than other shapes. In addition, rectangular holes have better influence on the function of diaphragms too.

Keywords: piezoresistive pressure sensor, Wheatstone bridge, diaphragm shape, holes

DOI 10.2412/mmse.87.47.99

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